Process Tubes, Boats, Wafer Carriers & Furnace Liners
High-purity fused silica and quartz glass are essential in semiconductor diffusion furnaces, CVD systems, and thermal oxidation equipment. Process tubes, wafer boats, and furnace liners must be cut to precise lengths with clean, flat faces — critical for gas-tight seals and thermal uniformity.
Vimfun's rotary-axis SH series produces clean cross-sections from quartz tubes up to Ø 600mm diameter without chipping the tube walls. The sanding-effect surface finish is compatible with semiconductor-grade quartz surface cleanliness requirements.
Explore semiconductor quartz cutting →